UNE-EN 62047-11:2013
$22.10
Semiconductor devices – Micro-electromechanical devices – Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
| Published By | Publication Date | Number of Pages |
| AENOR | 2013-11-01 | 23 |
| Published Code | AENOR |
|---|---|
| Published By | Asociación Española de Normalización |
| Publication Date | 2013-11-01 |
| Pages Count | 23 |
| Language | English |
| File Size | 1003.5 KB |
| ICS Codes | 31.080.99 - Other semiconductor devices |
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