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DIN EN ISO 25178-604:2013 Edition

DIN EN ISO 25178-604:2013 Edition

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Geometrical product specification (GPS) – Surface texture: Areal – Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments

Published By Publication Date Number of Pages
DIN 2013-12 47
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This part of ISO 25178-604 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

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DIN EN ISO 25178-604
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