ISO 14606:2015
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Surface chemical analysis — Sputter depth profiling — Optimization using layered systems as reference materials
| Published By | Publication Date | Number of Pages |
| ISO | 2015-12 | 24 |
ISO 14606:2015 gives guidance on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.
ISO 14606:2015 is not intended to cover the use of special multilayered systems such as delta doped layers.
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