{"id":423714,"date":"2024-10-20T06:48:05","date_gmt":"2024-10-20T06:48:05","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iso-146062022\/"},"modified":"2024-10-26T12:45:59","modified_gmt":"2024-10-26T12:45:59","slug":"bs-iso-146062022","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iso-146062022\/","title":{"rendered":"BS ISO 14606:2022"},"content":{"rendered":"
PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
---|---|---|---|---|---|---|---|
2<\/td>\n | National foreword <\/td>\n<\/tr>\n | ||||||
6<\/td>\n | Foreword <\/td>\n<\/tr>\n | ||||||
7<\/td>\n | Introduction <\/td>\n<\/tr>\n | ||||||
9<\/td>\n | 1 Scope 2 Normative references 3 Terms and definitions 4 Symbols and abbreviated terms <\/td>\n<\/tr>\n | ||||||
10<\/td>\n | 5 Setting parameters for sputter depth profiling 5.1 General 5.2 Auger electron spectroscopy <\/td>\n<\/tr>\n | ||||||
11<\/td>\n | 5.3 X-ray photoelectron spectroscopy 5.4 Secondary ion mass spectrometry <\/td>\n<\/tr>\n | ||||||
12<\/td>\n | 6 Depth resolution at an ideally sharp interface in sputter depth profiles 6.1 Measurement of depth resolution 6.2 Average sputtering rate \ufffc 6.3 Depth resolution \u2206z <\/td>\n<\/tr>\n | ||||||
13<\/td>\n | 7 Procedures for optimization of parameter settings 7.1 Alignment of sputtered area with a smaller analysis area 7.1.1 General <\/td>\n<\/tr>\n | ||||||
14<\/td>\n | 7.1.2 AES <\/td>\n<\/tr>\n | ||||||
15<\/td>\n | 7.1.3 XPS with a small probe (e.g. monochromator) 7.1.4 XPS with a large area source (e.g. without monochromator) 7.1.5 SIMS 7.2 Optimization of parameter settings <\/td>\n<\/tr>\n | ||||||
17<\/td>\n | Annex A (informative) Factors influencing the depth resolution <\/td>\n<\/tr>\n | ||||||
20<\/td>\n | Annex B (informative) Typical single-layered systems as reference materials <\/td>\n<\/tr>\n | ||||||
21<\/td>\n | Annex C (informative) Typical multilayered systems used as reference materials <\/td>\n<\/tr>\n | ||||||
22<\/td>\n | Annex D (informative) Uses of multilayered systems <\/td>\n<\/tr>\n | ||||||
23<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Surface chemical analysis. Sputter depth profiling. Optimization using layered systems as reference materials<\/b><\/p>\n |