{"id":593279,"date":"2024-11-05T21:30:07","date_gmt":"2024-11-05T21:30:07","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/iso-147062014\/"},"modified":"2024-11-05T21:30:07","modified_gmt":"2024-11-05T21:30:07","slug":"iso-147062014","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/iso\/iso-147062014\/","title":{"rendered":"ISO 14706:2014"},"content":{"rendered":"

ISO 14706:2014 specifies a TXRF method for the measurement of the atomic surface density of elemental contamination on chemomechanically polished or epitaxial silicon wafer surfaces. The method is applicable to the following: elements of atomic number from 16 (S) to 92 (U); contamination elements with atomic surface densities from 1 \u00d7 1010 atoms\/cm2 to 1 \u00d7 1014 atoms\/cm2; contamination elements with atomic surface densities from 5 \u00d7 108 atoms\/cm2 to 5 \u00d7 1012 atoms\/cm2 using a VPD (vapour-phase decomposition) specimen preparation method.<\/p>\n","protected":false},"excerpt":{"rendered":"

Surface chemical analysis \u2014 Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
ISO<\/b><\/a><\/td>\n2014-08<\/td>\n32<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":593293,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[1000,2634],"product_tag":[],"class_list":{"0":"post-593279","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-71-040-40","7":"product_cat-iso","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/593279","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/593293"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=593279"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=593279"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=593279"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}